Metrology method for the correlation of line edge roughness for different resists before and after etch
S. Winkelmeier, M. Sarstedt, M. Ereken, M. Goethals, K. RonseVolume:
57-58
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(01)00458-0
File:
PDF, 871 KB
english, 2001