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Ion acoustic microscopy for imaging of buried structures based on a focused ion beam system
Ch. Akhmadaliev, L. Bischoff, J. Teichert, K. KazbekovVolume:
57-58
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(01)00459-2
File:
PDF, 408 KB
english, 2001