Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining
C. Lehrer, L. Frey, S. Petersen, Th. Sulzbach, O. Ohlsson, Th. Dziomba, H.U. Danzebrink, H. RysselVolume:
57-58
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(01)00463-4
File:
PDF, 722 KB
english, 2001