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Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties
Patrick Schiavone, Gérard Granet, J.Y. RobicVolume:
57-58
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00472-5
File:
PDF, 234 KB
english, 2001