Design of hybrid micro optical elements with coded gray-tone mask
Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, Feng Gao, Jinglei Du, Jingqin Su, Yongkang GuoVolume:
57-58
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00493-2
File:
PDF, 1.01 MB
english, 2001