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Reference plate manufacturing process for the ion projection lithography pattern lock system
F. Letzkus, J. Butschke, M. Irmscher, C. Reuter, R. Springer, S. Eder, H. Löschner, R. Eberhardt, M. Mohaupt, A. Ehrmann, J. Mathuni, B. Panzer, T. StruckVolume:
57-58
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(01)00518-4
File:
PDF, 401 KB
english, 2001