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On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings
Bernd Schnabel, Ernst-Bernhard KleyVolume:
57-58
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00520-2
File:
PDF, 275 KB
english, 2001