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Characterization and application of a UV-based imprint technique
M. Otto, M. Bender, B. Hadam, B. Spangenberg, H. KurzVolume:
57-58
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(01)00536-6
File:
PDF, 624 KB
english, 2001