Negative (meth)acrylate resist materials based on novel...

Microelectronic Engineering 2001 Vol. 57-58; Iss. none

Negative (meth)acrylate resist materials based on novel crosslinking chemistry

Constantinos D Diakoumakos, Ioannis Raptis, Angeliki Tserepi, Panagiotis Argitis
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Volume:
57-58
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00545-7
File:
PDF, 533 KB
english, 2001
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