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Surface and line-edge roughness in plasma-developed resists
A. Tserepi, E.S. Valamontes, E. Tegou, I. Raptis, E. GogolidesVolume:
57-58
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(01)00546-9
File:
PDF, 642 KB
english, 2001