Roughness characterization in positive and negative resists
Vassilios Constantoudis, Evangelos Gogolides, Angeliki Tserepi, Constantinos D. Diakoumakos, Evangelos S. ValamontesVolume:
61-62
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00424-0
File:
PDF, 150 KB
english, 2002