PRIME process with Shipley SPR505A resist—simulations and experiments
K. Arshak, M. Mihov, A. Arshak, D. McDonagh, M. Pomeroy, M. CampionVolume:
61-62
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00446-x
File:
PDF, 838 KB
english, 2002