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Fabrication of wire-MOSFETs on silicon-on-insulator substrate
M. Heuser, M. Baus, B. Hadam, O. Winkler, B. Spangenberg, R. Granzner, M. Lemme, H. KurzVolume:
61-62
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(02)00465-3
File:
PDF, 218 KB
english, 2002