Evolution and control of the structure of a SiO2/semiconductor nanoelectronics material
K. Beltsios, P. Normand, E. Kapetanakis, D. Tsoukalas, A. TravlosVolume:
61-62
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(02)00467-7
File:
PDF, 462 KB
english, 2002