Multiple imprinting in UV-based nanoimprint lithography:...

Microelectronic Engineering 2002 Vol. 61-62; Iss. none

Multiple imprinting in UV-based nanoimprint lithography: related material issues

M. Bender, M. Otto, B. Hadam, B. Spangenberg, H. Kurz
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Volume:
61-62
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(02)00470-7
File:
PDF, 442 KB
english, 2002
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