Groove design of vacuum chucks for hot embossing lithography
L. Bendfeldt, H. Schulz, N. Roos, H.-C. ScheerVolume:
61-62
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(02)00473-2
File:
PDF, 427 KB
english, 2002