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Non-destructive method for monitoring glass transitions in thin photoresist films
Ioannis Raptis, Constantinos D. DiakoumakosVolume:
61-62
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(02)00503-8
File:
PDF, 171 KB
english, 2002