The role of secondary electrons in...

Microelectronic Engineering 2002 Vol. 61-62; Iss. none

The role of secondary electrons in electron-beam-induced-deposition spatial resolution

N. Silvis-Cividjian, C.W. Hagen, L.H.A. Leunissen, P. Kruit
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
61-62
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(02)00515-4
File:
PDF, 257 KB
english, 2002
Conversion to is in progress
Conversion to is failed