Resists for next generation lithography
Robert L. Brainard, George G. Barclay, Erik H. Anderson, Leonidas E. OcolaVolume:
61-62
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00564-6
File:
PDF, 862 KB
english, 2002