Reactive ion etching of metal stack consisting of an...

Reactive ion etching of metal stack consisting of an aluminium alloy, WGex, barrier and Ti adhesion layer

E. Sabouret, C. Schaffnit, J.F. Jongste, G.C.A.M. Janssen, S. Radelaar
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37-38
Year:
1997
Language:
english
Pages:
11
DOI:
10.1016/s0167-9317(97)00133-0
File:
PDF, 528 KB
english, 1997
Conversion to is in progress
Conversion to is failed