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Titanium monophosphide (TiP) layers as potential diffusion barriers
R. Leutenecker, B. Fröschle, P. RammVolume:
37-38
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(97)00138-x
File:
PDF, 353 KB
english, 1997