The effect of an additional Ti layer in a sub-μm double...

The effect of an additional Ti layer in a sub-μm double level TiTiNAlSiCuTiN metallization for a CMS-LOGIC-process

K.-H. Stegemann, C. Beyer, V. Heinig, V. Kahlert, J. Pahner
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37-38
Year:
1997
Language:
english
Pages:
10
DOI:
10.1016/s0167-9317(97)00140-8
File:
PDF, 599 KB
english, 1997
Conversion to is in progress
Conversion to is failed