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Optical proximity correction and its application to CD control in high-speed microprocessors
Anthony Yen, M. Burkhardt, J.R. Ilzhoefer, R.G. Fleck, H. Du, J. RandallVolume:
41-42
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(98)00014-8
File:
PDF, 457 KB
english, 1998