![](/img/cover-not-exists.png)
Complete manufacturability of sub-wavelength lithography using optical enhancements
Martin McCallum, Kevin Lucas, Mike Kling, John MaltabesVolume:
41-42
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(98)00019-7
File:
PDF, 315 KB
english, 1998