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TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k
Wen-an Loong, Chih-wei Chen, Ya-hui Chang, Cheng-ming Lin, Zheng Cui, Chien-an LungVolume:
41-42
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(98)00027-6
File:
PDF, 273 KB
english, 1998