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Evaluation of second generation DUV resists for advanced microprocessors
J.G. Maltabes, C. Yuan, C.C. Fu, J.S. Sturtevant, S. Blackley, L. PressleyVolume:
41-42
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(98)00070-7
File:
PDF, 193 KB
english, 1998