Piezoresistive sensors on AFM cantilevers with atomic resolution
R. Jumpertz, A.v.d. Hart, O. Ohlsson, F. Saurenbach, J. ScheltenVolume:
41-42
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(98)00102-6
File:
PDF, 300 KB
english, 1998