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Monodisperse aerosol particle deposition: Prospects for nanoelectronics
W. Prost, F.E. Kruis, F. Otten, K. Nielsch, B. Rellinghaus, U. Auer, A. Peled, E.F. Wassermann, H. Fissan, F.J. TegudeVolume:
41-42
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(98)00125-7
File:
PDF, 386 KB
english, 1998