A study of nonequilibrium diffusion modeling-applications...

A study of nonequilibrium diffusion modeling-applications to rapid thermal annealing and advanced bipolar technologies

Baccus, B., Wada, T., Shigyo, N., Norishima, M., Nakajima, H., Inou, K., Iinuma, T., Iwai, H.
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Volume:
39
Year:
1992
Language:
english
Pages:
14
DOI:
10.1109/16.123491
File:
PDF, 1.54 MB
english, 1992
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