Sub-half-micrometer concave MOSFET with double LDD...

IEEE Transactions on Electron Devices 1992 Vol. 39; Iss. 3

Sub-half-micrometer concave MOSFET with double LDD structure

Hieda, K., Sunouchi, K., Takato, H., Nitayama, A., Horiguchi, F., Masuoka, F.
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Volume:
39
Year:
1992
Language:
english
Pages:
6
DOI:
10.1109/16.123493
File:
PDF, 710 KB
english, 1992
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