High-reliability interconnections for ULSI using Al-Si-Pd-Nd/Mo layered films
Onuki, J., Koubuchi, Y., Suwa, M., Koizumi, M., Gardner, D.S., Suzuki, H., Minowa, E.Volume:
39
Year:
1992
Language:
english
Pages:
5
DOI:
10.1109/16.137311
File:
PDF, 682 KB
english, 1992