The effects of H2-O2-plasma treatment on the...

IEEE Transactions on Electron Devices 1993 Vol. 40; Iss. 12

The effects of H2-O2-plasma treatment on the characteristics of polysilicon thin-film transistors

Horng Nan Chern, Chung Len Lee, Tan Fu Lei
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Volume:
40
Year:
1993
Language:
english
Pages:
6
DOI:
10.1109/16.249479
File:
PDF, 612 KB
english, 1993
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