Lifetime of thin oxide and oxide-nitride-oxide dielectrics...

IEEE Transactions on Electron Devices 1989 Vol. 36; Iss. 5

Lifetime of thin oxide and oxide-nitride-oxide dielectrics within trench capacitors for DRAMs

Hiergeist, P., Spitzer, A., Rohl, S.
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Volume:
36
Year:
1989
Language:
english
Pages:
7
DOI:
10.1109/16.299673
File:
PDF, 772 KB
english, 1989
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