A new device design methodology for manufacturability

IEEE Transactions on Electron Devices 1998 Vol. 45; Iss. 3

A new device design methodology for manufacturability

Lu, J.-C., Holton, W.C., Fenner, J.S., Williams, S.C., Kim, K.W., Hartford, A.H., Chen, D., Roze, K., Littlejohn, M.A.
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Volume:
45
Year:
1998
Language:
english
Pages:
9
DOI:
10.1109/16.661225
File:
PDF, 262 KB
english, 1998
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