Gate-induced drain leakage current enhanced by plasma...

Gate-induced drain leakage current enhanced by plasma charging damage

Siguang Ma, Yaohui Zhang, Li, M.F., Weidan Li, Joseph Xie, Sheng, G.T.T., Yen, A.C., Wang, J.L.F.
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Volume:
48
Year:
2001
Language:
english
Pages:
3
DOI:
10.1109/16.918252
File:
PDF, 90 KB
english, 2001
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