Substrate and epitaxial issues for SiC power devices

IEEE Transactions on Electron Devices 2002 Vol. 49; Iss. 5

Substrate and epitaxial issues for SiC power devices

Spencer, M.G., Palmour, J., Carter, C.
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Volume:
49
Year:
2002
Language:
english
Pages:
6
DOI:
10.1109/16.998608
File:
PDF, 267 KB
english, 2002
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