Simplified plasma-coupled bipolar linear imager utilizing...

Simplified plasma-coupled bipolar linear imager utilizing an extended probe structure

Sakaue, M., Tamama, T., Mizushima, Y.
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Volume:
29
Year:
1982
Language:
english
Pages:
5
DOI:
10.1109/t-ed.1982.20861
File:
PDF, 780 KB
english, 1982
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