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Electron-beam fabrication of GaAs low-noise MESFET's using a new trilayer resist technique
Chao, P.C., Smith, P.M., Palmateer, S.C., Hwang, J.C.M.Volume:
32
Year:
1985
Language:
english
Pages:
5
DOI:
10.1109/t-ed.1985.22071
File:
PDF, 1.05 MB
english, 1985