Accurate and computationally efficient analytical 1-D and...

IEEE Transactions on Electron Devices 2002 Vol. 49; Iss. 7

Accurate and computationally efficient analytical 1-D and 2-D ion implantation models based on Legendre polynomials

Di Li, Shrivastav, G., Geng Wang, Yang Chen, Li Lin, Oak, S., Tasch, A., Banerjee, S.
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Volume:
49
Year:
2002
Language:
english
Pages:
11
DOI:
10.1109/ted.2002.1013273
File:
PDF, 474 KB
english, 2002
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