Anomalous phosphorous diffusion

IEEE Transactions on Electron Devices 2002 Vol. 49; Iss. 11

Anomalous phosphorous diffusion

Suzuki, K., Tashiro, H., Tada, Y., Kataoka, Y.
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Volume:
49
Year:
2002
Language:
english
Pages:
5
DOI:
10.1109/ted.2002.804708
File:
PDF, 339 KB
english, 2002
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