![](/img/cover-not-exists.png)
Quantitative internal thermal energy mapping of semiconductor devices under short current stress using backside laser interferometry
Pogany, D., Bychikhin, S., Furbock, C., Litzenberger, M., Gornik, E., Groos, G., Esmark, K., Stecher, M.Volume:
49
Year:
2002
Language:
english
Pages:
10
DOI:
10.1109/ted.2002.804724
File:
PDF, 617 KB
english, 2002