Optimization of AuGe-Ni-Au ohmic contacts for GaAs MOSFETs

IEEE Transactions on Electron Devices 2003 Vol. 50; Iss. 4

Optimization of AuGe-Ni-Au ohmic contacts for GaAs MOSFETs

Hung-Cheng Lin, Senanayake, S., Keh-Yung Cheng, Minghwei Hong, Kwo, J.R., Bin Yang, Mannaerts, J.P.
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Volume:
50
Year:
2003
Language:
english
Pages:
6
DOI:
10.1109/ted.2003.812097
File:
PDF, 548 KB
english, 2003
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