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Localized oxide degradation in ultrathin gate dielectric and its statistical analysis
Wei Yip Loh, Byung Jin Cho, Ming Fu Li, Chan, D.S.H., Chew Hoe Ang, Jia Zhen Zheng, Dim Lee KwongVolume:
50
Year:
2003
Language:
english
Pages:
6
DOI:
10.1109/ted.2003.812105
File:
PDF, 362 KB
english, 2003