Electrical characteristics and reliability of UV transparent Si3N4 metal-insulator-metal (MIM) capacitors
Bolam, R.J., Ramachandran, V., Coolbaugh, D., Watson, K.M.Volume:
50
Year:
2003
Language:
english
Pages:
4
DOI:
10.1109/ted.2003.812148
File:
PDF, 656 KB
english, 2003