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Impact of nonuniform graded dopant profile in polysilicon gate on gate leakage current
Sarkar, M., Ang Chew Hoe, Huang Jiayi, Chen, T.P.Volume:
52
Year:
2005
Language:
english
Pages:
5
DOI:
10.1109/ted.2005.848104
File:
PDF, 363 KB
english, 2005