Scalability of Stress Induced by Contact-Etch-Stop Layers:...

IEEE Transactions on Electron Devices 2007 Vol. 54; Iss. 6

Scalability of Stress Induced by Contact-Etch-Stop Layers: A Simulation Study

Eneman, G., Verheyen, P., De Keersgieter, A., Jurczak, M., De Meyer, K.
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Volume:
54
Year:
2007
Language:
english
Pages:
8
DOI:
10.1109/ted.2007.896367
File:
PDF, 388 KB
english, 2007
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