Investigation of Metallized Source/Drain Extension for...

IEEE Transactions on Electron Devices 2008 Vol. 55; Iss. 11

Investigation of Metallized Source/Drain Extension for High-Performance Strained NMOSFETs

Tzu-Juei Wang, Chih-Hsin Ko, Hong-Nien Lin, Shoou-Jinn Chang, San-Lein Wu, Ta-Ming Kuan, Wen-Chin Lee
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Volume:
55
Year:
2008
Language:
english
Pages:
6
DOI:
10.1109/ted.2008.2004245
File:
PDF, 365 KB
english, 2008
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