Fabrication and Characterization of Multiple-Gated Poly-Si...

Fabrication and Characterization of Multiple-Gated Poly-Si Nanowire Thin-Film Transistors and Impacts of Multiple-Gate Structures on Device Fluctuations

Hsing-Hui Hsu, Ta-Wei Liu, Leng Chan, Chuan-Ding Lin, Tiao-Yuan Huang, Horng-Chih Lin
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Volume:
55
Year:
2008
Language:
english
Pages:
7
DOI:
10.1109/ted.2008.2005161
File:
PDF, 1.47 MB
english, 2008
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