External Stresses on Tensile and Compressive Contact Etching Stop Layer SOI MOSFETs
Wen-Teng Chang, Chih-Chung Wang, Jian-An Lin, Wen-Kuan YehVolume:
57
Year:
2010
Language:
english
Pages:
6
DOI:
10.1109/ted.2010.2051362
File:
PDF, 301 KB
english, 2010