Insulating Halos to Boost Planar NMOSFET Performance

IEEE Transactions on Electron Devices 2010 Vol. 57; Iss. 10

Insulating Halos to Boost Planar NMOSFET Performance

Wen-Wei Hsu, Chao-Yun Lai, Chee Wee Liu, Chih-Hsin Ko, Ta-Ming Kuan, Tzu-Juei Wang, Wen-Chin Lee, Wann, C.H.
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Volume:
57
Year:
2010
Language:
english
Pages:
5
DOI:
10.1109/ted.2010.2061751
File:
PDF, 816 KB
english, 2010
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